Microfluidic
Embedded NEMS
for Medical
Diagnostics
The ability to perform multiparameter testing, on blood volumes of ~10μL
or less in less than 20 minutes could revolutionalize medical diagnostic
lab work, allowing for point of care diagnosis for a tremendous range of
disorders and pathogens. To
achieve this will require new technologies.
We are exploring novel geometries for NEMS-based concentration
sensing. Fig. 1 shows a
silicon NEMS cantilever embedded in microfluidics.
Nanoscale devices have great promise for enhanced sensitivity.
However, for devices immersed in fluid this sensitivity is
compromised by heavy damping. We are exploring novel geometries to
achieve the greatest possible sensitivity with minimal damping.
This includes exploring modes
which are less influenced by the solution, and suspended microchannel
resonators, a novel design first pioneered by T.P. Burg et al. (Nature,
2007). Reducing the
dimensions of the devices leads to a decrease in surface area and
consequently capture probability.
Critical to the success of these efforts will be the large scale
integration of arrays of devices towards a nanosystem.
This effort therefore ties in closely with other efforts in the
group in this area.
Chemical recognition is a critical component to achieving specificity
across almost all
biodetection platforms. With
this in mind we are pursuing both traditional and novel forms of device
functionalization. For the
latter we are pursuing a bead based protocol in which functionalized
beads are captured on the device via dielectrophoresis to form a
functionalized device (Fig. 2).
The protocol being developed with allow for control over the
position of individual beads.
Most of
what we have learned from biology comes from studying large ensembles of
cells. With these techniques
we will have the ability to monitor
a matrix of cells - with resolution at the individual cell level.
This has the potential to open entire fields of research, with
possibilities still waiting to be discovered.

Figure 1.
Assembly of microfluidics-embedded nanocantilever arrays into
functional microanalysis systems.
The top left panel shows front and backside views of
individual 1x1 cm nanosensor chips fused front and back with
microfluidic systems.
The top central panel is a scanning electron microscope (SEM)
image of two of the MEMS sensors at the heart of the device.
The top right and bottom left panels are progressive
magnifications of the microfluidic delivery system on the backside of
the chip, showing the 70 mm x 70 mm
fluidic vias through the chip (comprising a total
volume of 1.5 μL)
coupled to 16 analyte delivery channels, a peristaltic sample
recirculation pump, and a valved sample exhaust port.
The total volume including delivery channel, circulation
loop, exhaust port, and 2 fluidic vias is of order 4
μL.
The two panels on the bottom right show a top/bottom
view of a current-generation 2x3 cm chip
mount which provides up to 40 fluidic
input/output lines and electrical connections for up to 20
nanocantilevers.